Sputtering By Particle Bombardment Iii: Characteristics Of Sputtered Particles, Technical Applications

Rainer Behrisch, Klaus Wittmaack, R. Behrisch, W. Hauffe, W.O. Hofer, N. Laegreid, E.D. McClanahan, B.U.R. Sundqvist, K. Wittmaack, M.L. Yu,

ISBN 10: 3540534288 / ISBN 13: 9783540534280

Published by Springer, 1991

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Bibliographic Details

• Title: Sputtering By Particle Bombardment Iii: Characteristics Of Sputtered Particles, Technical Applications
• Publisher: Springer
• Publication Date: 1991
• Language: English
• ISBN 10: 3540534288
• ISBN 13: 9783540534280
• Binding: Hardcover
• Condition: Brand New

About this title

Synopsis

Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along with their charge and excitation states, while the applications described include surface and depth analysis, micromachining, and the production of surface coatings and thin films. This textbook on surface physics, materials science and semiconductor technology is intended for researchers in universities and industrial laboratories and also engineers.