Title: Sputtering By Particle Bombardment Iii: Characteristics Of Sputtered Particles, Technical Applications
Publisher: Springer
Publication Date: 1991
Language: English
ISBN 10: 3540534288
ISBN 13: 9783540534280
Binding: Hardcover
Condition: New

About this title

Synopsis

Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along with their charge and excitation states, while the applications described include surface and depth analysis, micromachining, and the production of surface coatings and thin films. This textbook on surface physics, materials science and semiconductor technology is intended for researchers in universities and industrial laboratories and also engineers.

"About this title" may belong to another edition of this title.

Store Description

We sell textbooks to students at very affordable prices. All books are brand new, satisfaction guaranteed.

Visit Seller's Storefront

Seller's business information

Romtrade Corp.
39137 BYERS DR., STERLING HEIGHTS, MI, 48310, U.S.A.

Sale & Shipping Terms

Terms of Sale

We guarantee the condition of every book as it's described on the Abebooks web
sites. If you're dissatisfied with your purchase (Incorrect Book/Not as
Described/Damaged) or if the order hasn't arrived, you're eligible for a refund
within 30 days of the estimated delivery date. If you've changed your mind about
a book that you've ordered, please use the Ask bookseller a question link to
contact us and we'll respond within 2 business days. The contact persons name is
Constantin Marandici and the m...

More Information

Right of cancellation

Shipping Terms

Orders usually ship within 2 business days. Shipping costs are based on books weighing 2.2 LB, or 1 KG. If your book order is heavy or oversized, we may contact you to let you know extra shipping is required. We use USPS, DHL and ARAMEX for shipping.

Shipping rates within U.S.A.

Shipping rates within U.S.A.
Order quantity	5 to 10 business days	3 to 6 business days
First item	� 0.00	� 0.00

Delivery times are set by sellers and vary by carrier and location. Orders passing through Customs may face delays and buyers are responsible for any associated duties or fees. Sellers may contact you regarding additional charges to cover any increased costs to ship your items.