Physics of Radio-Frequency Plasmas

Pascal Chabert

ISBN 10: 0521763002 / ISBN 13: 9780521763004

Published by Cambridge University Press, 2011

About this Item

Focussing on the physics of low-temperature radio frequency plasmas, for graduate students and researchers in applied physics and electrical engineering. Num Pages: 394 pages, 156 b/w illus. 144 exercises. BIC Classification: PH; TGB. Category: (P) Professional & Vocational. Dimension: 250 x 174 x 24. Weight in Grams: 932. 394 pages, 156 b/w illus. 144 exercises. Focussing on the physics of low-temperature radio frequency plasmas, for graduate students and researchers in applied physics and electrical engineering. Cateogry: (P) Professional & Vocational. BIC Classification: PH; TGB. Dimension: 250 x 174 x 24. Weight: 936. . 2011. 1st Edition. Hardcover. . . . . Books ship from the US and Ireland. Seller Inventory # V9780521763004

Bibliographic Details

Title: Physics of Radio-Frequency Plasmas

Publisher: Cambridge University Press

Publication Date: 2011

Binding: Hardcover

Condition: New

About this title

Synopsis:

Focussing on the physics of low-temperature radio frequency plasmas, for graduate students and researchers in applied physics and electrical engineering.

About the Authors:

Pascal Chabert is currently Research Director within CNRS. He leads the Low-Temperature Plasmas group of the Laboratoire de Physique des Plasmas at Ecole Polytechnique. His expertise is in plasma physics and plasma processing.

Nicholas Braithwaite is Professor of Engineering Physics at The Open University, where his research group work on the physics of 'technological' plasmas. He has been on the editorial board of the journal Plasma Sources Science and Technology since 1998.