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Nanoscale Calibration Standards and Methods

GŁnter Wilkening

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ISBN 10: 352740502X / ISBN 13: 9783527405022
Published by Wiley VCH Verlag Gmbh Mai 2005, 2005
New Condition: Neu
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Neuware - The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods. The seminar 'NanoScale 2004' (6th Seminar on Quantitative Microscopy and 2nd Seminar on Nanoscale Calibration Standards and Methods) at the National Metrology Institute (Physikalisch-Technische Bundesanstalt PTB), Braunschweig, Germany, continues the series of seminars on Quantitative Microscopy. The series stimulates the exchange of information between manufacturers of relevant hard- and software and the users in science and industry. Topics addressed in these proceedings are a) the application of quantitative measurements and measurement problems in: microelectronics, microsystems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, materials science, surface processing b) calibration & correction methods: calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncertainty of measurements c) instrumentation and methods: novel/improved instruments and methods, reproducible probe/sample positioning, position-measuring systems, novel/improved probe/detector systems, linearization methods, image processing 519 pp. Englisch. Bookseller Inventory # 9783527405022

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Bibliographic Details

Title: Nanoscale Calibration Standards and Methods

Publisher: Wiley VCH Verlag Gmbh Mai 2005

Publication Date: 2005

Binding: Buch

Book Condition:Neu

About this title

Synopsis:

The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods. The seminar "NanoScale 2004" (6th Seminar on Quantitative Microscopy and 2nd Seminar on Nanoscale Calibration Standards and Methods) at the National Metrology Institute (Physikalisch-Technische Bundesanstalt PTB), Braunschweig, Germany, continues the series of seminars on Quantitative Microscopy. The series stimulates the exchange of information between manufacturers of relevant hard- and software and the users in science and industry.

Topics addressed in these proceedings are
a) the application of quantitative measurements and measurement problems in: microelectronics, microsystems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, materials science, surface processing
b) calibration & correction methods: calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncertainty of measurements
c) instrumentation and methods: novel/improved instruments and methods, reproducible probe/sample positioning, position-measuring systems, novel/improved probe/detector systems, linearization methods, image processing

From the Back Cover:

The quantitative determination of the properties of micro- and nanostructures is essential in research and development. Here, peer-reviewed papers are presented with contributions for the NanoScale 2004 seminar at the Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, Germany, in March 2004. Topics include problems of quantitative measurement as well as methods of calibration, correction and instrumentation. The seminar stimulates the exchange of information between users in science and industry and manufacturers of the relevant hard- and software.

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