Mems and Moems : Technology and Applications
Rai-Choudhury, P. (EDT)
ISBN 10: 0819437166 ISBN 13: 9780819437167
Published by SPIE Publications, 2000
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Synopsis:
The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.
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Bibliographic Details
Title: Mems and Moems : Technology and Applications
Publisher: SPIE Publications
Publication Date: 2000
Binding: Hardcover
Condition: good
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