704 pp. hardcover, ex library, else text and binding clean and tight. - If you are reading this, this item is actually (physically) in our stock and ready for shipment once ordered. We are not bookjackers. Buyer is responsible for any additional duties, taxes, or fees required by recipient's country. Seller Inventory # ZB594530

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Bibliographic Details

Title: Emerging Semiconductor Technology. ASTM ...

Publisher: Philadelphia

Publication Date: 1987

Binding: Hardcover

Condition: Good

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Synopsis:

50 peer-reviewed papers cover: Epitaxial Technology Dielectrics and Junction Formation Techniques Plasma Technology and Other Fabrication Techniques Material Defects, Oxygen and Carbon in Silicon Yield Enhancement and Contamination Control Aspects Dopant Profiling Techniques and In-Process Measurement: and Fab Equipment: Automation and Reliability.

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