Microsystem Technology and Microrobotics: XII (Microsystem Technology & Microrobotics) - Hardcover

Fatikow, Sergej; Rembold, Ulrich

 
9783540606581: Microsystem Technology and Microrobotics: XII (Microsystem Technology & Microrobotics)
Hardcover
ISBN 10: 3540606580 ISBN 13: 9783540606581
Publisher: Springer, 1997

Synopsis

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

"synopsis" may belong to another edition of this title.

From the Back Cover

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots. Pictures and photos ease unterstanding and a wealth of references allow further work.

"About this title" may belong to another edition of this title.

Publisher
Springer
Publication date
1997
Language
English
ISBN 10 
3540606580
ISBN 13 
9783540606581
Binding
Hardcover
Number of pages
420

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