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Synopsis
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
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From the Back Cover
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots. Pictures and photos ease unterstanding and a wealth of references allow further work.
"About this title" may belong to another edition of this title.
- PublisherSpringer
- Publication date1997
- ISBN 10 3540606580
- ISBN 13 9783540606581
- BindingHardcover
- LanguageEnglish
- Number of pages420
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Microsystem Technology and Microrobotics
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ISBN 13: 9783540606581
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Microsystem Technology and Microrobotics (Microsystem Technology & Microrobotics) [Hardcover] Fatikow, Sergej and Rembold, Ulrich
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Microsystem Technology and Microrobotics
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Buch. Condition: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots. 428 pp. Englisch. Seller Inventory # 9783540606581
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Microsystem Technology and Microrobotics
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Buch. Condition: Neu. Druck auf Anfrage Neuware - Printed after ordering - Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots. Seller Inventory # 9783540606581
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Microsystem Technology and Microrobotics
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Buch. Condition: Neu. Neuware -Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg 428 pp. Englisch. Seller Inventory # 9783540606581
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Microsystem Technology and Microrobotics (Microsystem Technology & Microrobotics)
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Microsystem Technology and Microrobotics
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Microsystem Technology and Microrobotics
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