Characterization in Silicon Processing (AGENCY/DISTRIBUTED) - Hardcover

Yale E. Strausser (author)

Hardcover

ISBN 10: 1606501097 ISBN 13: 9781606501092

Publisher: Momentum Press, 2010

Synopsis

With a focus on the use of materials characterization techniques for silicon-based semiconductors, this volume in "Materials Characterization Series" focuses on the process flow of silicon wafer manufacture where materials properties, processing and associated problems are brought to the fore. The book is organized by the types of materials commonly associated with integrated silicon semiconductor circuits and the typical processes involved for each such material, including deposition, thermal treatment, and lithography. Readers will find features such as: the essential processes of Silicon Epitaxial Growth; the coverage of Polysilicon Conductors, Silicides, Aluminum- and Copper-based Conductors, Tungsten-based Conductors; and, concise summaries of major characterization technologies for silicon and related semiconductor materials, including Auger Electron Spectroscopy, Energy-Dispersive X-Ray Spectroscopy, Neutron Activation Analysis and Raman Spectroscopy.

About this title

About the Author

Yale E. Strausser

Edition details

• Publisher: Momentum Press
• Publication date: 2010
• ISBN 10: 1606501097
• ISBN 13: 9781606501092
• Binding: Hardcover
• Language: English
• Number of pages: 240