Characterization of Plasma-Enhanced CVD Processes: Volume 165 (MRS Proceedings) - Hardcover

9781558990531: Characterization of Plasma-Enhanced CVD Processes: Volume 165 (MRS Proceedings)

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ISBN 10: 1558990534 ISBN 13: 9781558990531

Publisher: Cambridge University Press, 1990

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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Publisher: Cambridge University Press
Publication date: 1990
Language: English
ISBN 10: 1558990534
ISBN 13: 9781558990531
Binding: Hardcover
Number of pages: 270
Editor: Lucovsky Gerald, Ibbotson Dale E., Hess Dennis W.

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CHARACTERIZATION OF PLASMA-ENHANCED CVD PROCESSES

GERALD LUCOVSKY, NORTH CAROLINA STATE UNIVERSITYDALE E. IBBOTSON, AT&T BELL LABORATORIES, NEW JERSEYDENNIS W. HESS, UNIVERSITY OF CALIFORNIA, BERKELEY

Published by Cambridge University Press, 1990

ISBN 10: 1558990534 ISBN 13: 9781558990531

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