In this book, an international team of authors from both industrial and academic research consider recent progress in polymers for microelectronics. They offer detailed coverage of
∗ fundamental and applied research on resists and related compounds ∗ polyimides and other functional polymers for microelectronics ∗ new photoresponsive polymers for optical memory and related applications.
Chemists and physicists active in this field will find here an exhaustive state–of–the–art report on one of the key elements of advanced technologies.
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