Key Features: outlines industrial applications for smart sensors and smart MEMS; covers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperature; covers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers.
Contents: Part 1 Smart sensors for industrial applications: What makes sensor devices and microsystems intelligent or smart ? Direct interface circuits for sensors; Capacitive sensors for displacement measurement in the sub-nanometer range; Integrated inductive displacement sensors for harsh industrial environments; Advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range; Integrated polarization analyzing CMOS image sensors for detection and signal processing; Advanced interfaces for resistive sensors; Reconfigurable ultrasonic smart sensor platform for nondestructive evaluation and imaging applications; Advanced optical incremental sensors: encoders and interferometers. Part 2 Smart micro-electro-mechanical systems (MEMS) for industrial applications: Microfabrication technologies used for creating smart devices for industrial applications; Microactuators: Design and technology; Dynamic behavior of smart MEMS in industrial applications; MEMS integrating motion and displacement sensors; MEMS print heads for industrial printing; Photovoltaic and fuel cells in power MEMS for smart energy management; Radio frequency (RF)-MEMS for smart communication microsystems; Smart acoustic sensor array (SASA) system for real-time sound processing applications.
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