Synopsis
Nanotechnology and microengineering are among the top priority research areas in the United States and will continue to be so during the next decade, making Fundamentals of Microfabrication an important and timely work. Written by an internationally recognized expert on sensors and sensor instrumentation who is also a leading authority on nanotechnology and microfabrication, this book will function as both a valuable textbook and a handy reference. Ten chapters discuss in detail topics such as lithography, pattern transfer, wet and dry bulk micromachining, surface micromachining, and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are examined. Bonding and packaging issues are defined. The book also presents quantum structures and reviews molecular engineering. Numerous appendices offer valuable information in an easily accessible format.
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Review
"The Fundamentals of Microfabrication describes the science of miniaturization, which demonstrates ways of making devices using smaller and smaller materials. This book brings an understanding of manufacturing options, material choices, and size...This book is well written and very informative for anyone interested in this area of engineering and could be used in an advanced course for the study of microfabrication." -Diane Kauzlarick, EET
Synopsis
Fundamentals of Microfabrication is the first book to examine all aspects of the attempt to build functional devices at a molecular size. Ten chapters discuss in detail topics such as lithography, pattern transfer, wet and dry bulk micromachining, surface micromachining, and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are examined. Bonding and packaging issues are defined. The book also presents quantum structures and reviews molecular engineering. Numerous appendices offer valuable information in an easily accessible format.
"About this title" may belong to another edition of this title.
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Fundamentals of Microfabrication
Published by
CRC Press (edition First Edition), 1998
ISBN 10: 0849394511
ISBN 13: 9780849394515
Used
Hardcover
First Edition
Seller: BooksRun, Philadelphia, PA, U.S.A.
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Hardcover. Condition: Good. First Edition. It's a preowned item in good condition and includes all the pages. It may have some general signs of wear and tear, such as markings, highlighting, slight damage to the cover, minimal wear to the binding, etc., but they will not affect the overall reading experience. Seller Inventory # 0849394511-11-1
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Fundamentals of Microfabrication
Seller: Better World Books, Mishawaka, IN, U.S.A.
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Condition: Very Good. Used book that is in excellent condition. May show signs of wear or have minor defects. Seller Inventory # 1061662-20
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Fundamentals of Microfabrication
Seller: HPB-Red, Dallas, TX, U.S.A.
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Hardcover. Condition: Acceptable. Connecting readers with great books since 1972. Used textbooks may not include companion materials such as access codes, etc. May have condition issues including wear and notes/highlighting. We ship orders daily and Customer Service is our top priority! Seller Inventory # S_452611676
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Fundamentals of Microfabrication
Seller: HPB-Red, Dallas, TX, U.S.A.
Seller rating 5 out of 5 stars
Hardcover. Condition: Good. Connecting readers with great books since 1972! Used textbooks may not include companion materials such as access codes, etc. May have some wear or writing/highlighting. We ship orders daily and Customer Service is our top priority! Seller Inventory # S_398487509
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Fundamentals of Microfabrication
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Hardcover. Condition: Good. No Jacket. Missing dust jacket; Pages can have notes/highlighting. Spine may show signs of wear. ~ ThriftBooks: Read More, Spend Less. Seller Inventory # G0849394511I3N01
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Fundamentals of Microfabrication
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Hardcover. Condition: As New. No Jacket. Pages are clean and are not marred by notes or folds of any kind. ~ ThriftBooks: Read More, Spend Less. Seller Inventory # G0849394511I2N00
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Fundamentals of Microfabrication
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Hardcover. Condition: Fair. No Jacket. Readable copy. Pages may have considerable notes/highlighting. ~ ThriftBooks: Read More, Spend Less. Seller Inventory # G0849394511I5N00
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Fundamentals of Microfabrication
Seller: 3Brothers Bookstore, Egg harbor township, NJ, U.S.A.
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Condition: good. Books may contain some notes and highlighting. Supplements such as Access Codes, Cd's Dust Jackets, etc. are not guaranteed with used book purchases. Seller Inventory # EVV.0849394511.G
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Fundamentals of Microfabrication
Seller: Better World Books Ltd, Dunfermline, United Kingdom
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Condition: Very Good. Ships from the UK. Former library book; may include library markings. Used book that is in excellent condition. May show signs of wear or have minor defects. Seller Inventory # 52201902-20
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Fundamentals of Microfabrication
Seller: Anybook.com, Lincoln, United Kingdom
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Condition: Fair. This is an ex-library book and may have the usual library/used-book markings inside.This book has hardback covers. Clean from markings. In fair condition, suitable as a study copy. Please note the Image in this listing is a stock photo and may not match the covers of the actual item,1950grams, ISBN:9780849394515. Seller Inventory # 8959846