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Synopsis
50 peer-reviewed papers cover: Epitaxial Technology Dielectrics and Junction Formation Techniques Plasma Technology and Other Fabrication Techniques Material Defects, Oxygen and Carbon in Silicon Yield Enhancement and Contamination Control Aspects Dopant Profiling Techniques and In-Process Measurement: and Fab Equipment: Automation and Reliability.
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- PublisherAmerican Society for Testing & Materials
- Publication date1987
- ISBN 10 0803104596
- ISBN 13 9780803104594
- BindingHardcover
- LanguageEnglish
- Number of pages725
- EditorGupta Dinesh C., Langer Paul H.
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Emerging Semiconductor Technology. ASTM Special Technical Publication 960
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Emerging Semiconductor Technology: A Symposium
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Hardcover. Condition: Good. No Jacket. Former library book; Pages can have notes/highlighting. Spine may show signs of wear. ~ ThriftBooks: Read More, Spend Less 1.01. Seller Inventory # G0803104596I3N10
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EMERGING SEMICONDUCTOR TECHNOLOGY: a symposium, 28-31 January 1986, San Jose, California, ASTM SPECIAL TECHNICAL PUBLICATION NO. 960.
Published by
American Society for Testing and Materials, Philadelphia, PA, U.S.A., 1987
ISBN 10: 0803104596
ISBN 13: 9780803104594
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Hardcover
First Edition
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Seller rating 4 out of 5 stars
Hardcover. Condition: Very Good. No Jacket. 1st. w/full markings, pocket, and/or bookplate. Wear, soil. 704 numbered pages but 725 for Amz. Size: 8vo. Ex-Library. Seller Inventory # 019140
Quantity: 1 available