Semiconductor Manufacturing Technology - Softcover

Quirk, Michael; Serda, Julian

Softcover

ISBN 10: 0130815209 ISBN 13: 9780130815200

Publisher: Pearson, 2000

Synopsis

For the introductory course in Semiconductor Manufacturing Technology.

This text introduces the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra-large-scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications.

About this title

From the Back Cover:

This book is written for students in two- and four-year technology programs at community colleges and universities. Chapters are organized around the broad technologies applicable to semiconductor manufacturing.

Chapters 1 to 8 present fundamental technical information relevant to semiconductor manufacturing. Chapter 9 presents a process model overview with a general flowchart that links the major areas in wafer fabrication. Chapters 10 to 19 cover each of the major processes. Each process chapter concludes with a summary of quality measures and troubleshooting issues to provide the student with practical challenges encountered during wafer fabrication. Chapter 20 provides an overview of the back-end process for IC assembly and packaging.

Academic and industry reviewers have applauded this book as the most comprehensive and up-to-date text currently available in the market.

About this edition

• Publisher: Pearson
• Publication date: 2000
• ISBN 10: 0130815209
• ISBN 13: 9780130815200
• Binding: Paperback
• Number of pages: 666