Semiconductor Manufacturing Technology

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9780130815200: Semiconductor Manufacturing Technology

An introduction to the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra-large-scale integrated semiconductors. The book provides technical information and strikes a balance between the process and equipment technology found in wafer fabrications. Included is: information on process requirement versus equipment capability; a comprehensive model of manufacturing process; an in-depth review of copper metallization and low-k dielectric; a chapter on chemical-mechanical planarization; information on equipment and process troubleshooting; and intructional support in each chapter.

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Product Description:

For the introductory course in Semiconductor Manufacturing Technology.

This text introduces the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra-large-scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications.

From the Back Cover:

This book is written for students in two- and four-year technology programs at community colleges and universities. Chapters are organized around the broad technologies applicable to semiconductor manufacturing.

Chapters 1 to 8 present fundamental technical information relevant to semiconductor manufacturing. Chapter 9 presents a process model overview with a general flowchart that links the major areas in wafer fabrication. Chapters 10 to 19 cover each of the major processes. Each process chapter concludes with a summary of quality measures and troubleshooting issues to provide the student with practical challenges encountered during wafer fabrication. Chapter 20 provides an overview of the back-end process for IC assembly and packaging.

Academic and industry reviewers have applauded this book as the most comprehensive and up-to-date text currently available in the market.

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