Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. * Provides a basic introduction to measurement and instruments * Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force * Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal , variable focus, and scattering instruments) * Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) * Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge
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Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati
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