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Fundamental Principles of Engineering Nanometrology (Micro and Nano Technologies) - Hardcover

Richard Leach

 
9780080964546: Fundamental Principles of Engineering Nanometrology (Micro and Nano Technologies)
Hardcover
ISBN 10: 0080964540 ISBN 13: 9780080964546
Publisher: William Andrew, 2009

Synopsis

Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.

  • Provides a basic introduction to measurement and instruments
  • Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force
  • Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments)
  • Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)
  • Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge

"synopsis" may belong to another edition of this title.

About the Author

Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati

"About this title" may belong to another edition of this title.

Publisher
William Andrew
Publication date
2009
Language
English
ISBN 10 
0080964540
ISBN 13 
9780080964546
Binding
Hardcover
Number of pages
352