Items related to ULSI Technology

Chang, C. Y. ULSI Technology ISBN 13: 9780071141055

ULSI Technology - Softcover

 
9780071141055: ULSI Technology
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This text follows the tradition of Sze's highly successful pioneering text on VLSI technology and is updated with the latest advances in the field of microelectronic chip fabrication. Since computer chips are foundations of modern electronics, these topics are essential for the next generation of USLI technologies, allowing more transistors to be packaged on a single chip. Contributing to each chapter are industry experts, specializing in topics such as epitaxy with low temperature process, rapid thermal processes, low damage plasma reactive ion etching, fine line litography, cleaning technology, clean room technology, packing and reliability.

"synopsis" may belong to another edition of this title.

From the Publisher:
- Whole chapter concerned with clean room engineering, or dust free environments.
- Both a text and a reference, as chapter material written by experts, but still contains worked examples, homework problems and illustrations.
- Authors/Editors are ULSI pioneers with extensive professional and academic experience.

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  • PublisherMcGraw-Hill Higher Education
  • Publication date1996
  • ISBN 10 0071141057
  • ISBN 13 9780071141055
  • BindingPaperback
  • Number of pages640

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Other Popular Editions of the Same Title

9780070627352: VLSI Technology (MCGRAW HILL SERIES IN ELECTRICAL AND COMPUTER ENGINEERING)

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Publisher: McGraw-Hill Education, 1998
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Chang, C. Y.
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ISBN 10: 0071141057 ISBN 13: 9780071141055
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