Semiconductor Manufacturing Handbook - Hardcover

Geng, Hwaiyu

9780071445597: Semiconductor Manufacturing Handbook

Hardcover

ISBN 10: 0071445595 ISBN 13: 9780071445597

Publisher: McGraw-Hill Education, 2005

This handbook will provide engineers with the principles, applications, and solutions needed to design and manage semiconductor manufacturing operations. Consolidating the many complex fields of semiconductor fundamentals and manufacturing into one volume by deploying a team of world class specialists, it allows the quick look up of specific manufacturing reference data across many subdisciplines.

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From the Publisher:

MEMs technologies

Cleanroom design and operation

e-Manufacturing

Fab design and operation

Waste management

From the Back Cover:

WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS

This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged with optimizing the design and performance of manufacturing processes will find all the information necessary to produce the highest quality chips at the lowest price in the shortest time possible. The Semiconductor Manufacturing Handbook provides leading-edge information on semiconductor wafer processes, MEMS, nanotechnology, and FPD, plus the latest manufacturing and automation technologies, including:

Yield Management
Automated Material Handling System
Fab and Cleanroom Design and Operation
Gas Abatement and Waste Treatment Management
And much more

Written by 60 international experts, and peer reviewed by a seasoned advisory board, this handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes. It includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research. This inclusive, wide-ranging coverage makes the Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field.

STATE-OF-THE-ART SEMICONDUCTOR TECHNOLOGIES AND MANUFACTURING PROCESSES:

SEMICONDUCTOR FUNDAMENTALS
How Chips Are Designed and Made * Substrates * Copper and Low-k Dielectrics * Silicide Formation * Plasma * Vacuum * Photomask
WAFER PROCESSING TECHNOLOGIES
Microlithography * Ion Implantation * Etch * PVD/ALD * CVD * ECD * Epitaxy * CMP * Wet Cleaning
FINAL MANUFACTURING
Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing
NANOTECHNOLOGY, MEMS, AND FPD GAS AND CHEMICALS
Specialty Gas System and DCA * Gas Abatement Systems * Chemical and Slurries Delivery System * Ultra Pure Water
FAB YIELD, OPERATIONS, AND FACILITIES
Yield Management * Automated Materials Handling System * Metrology * Six Sigma * Advanced Process Control * EHS * Fab Design and Construction * Cleanroom * Vibration and Acoustic Control * ESD * Airborne Molecular Control * Particle Monitoring * Wastewater Neutralization Systems

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