Chang, C. Y. ULSI Technology

ISBN 13: 9780071141055

ULSI Technology

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9780071141055: ULSI Technology

This text follows the tradition of Sze's highly successful pioneering text on VLSI technology and is updated with the latest advances in the field of microelectronic chip fabrication. Since computer chips are foundations of modern electronics, these topics are essential for the next generation of USLI technologies, allowing more transistors to be packaged on a single chip. Contributing to each chapter are industry experts, specializing in topics such as epitaxy with low temperature process, rapid thermal processes, low damage plasma reactive ion etching, fine line litography, cleaning technology, clean room technology, packing and reliability.

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From the Publisher:

- Whole chapter concerned with clean room engineering, or dust free environments.
- Both a text and a reference, as chapter material written by experts, but still contains worked examples, homework problems and illustrations.
- Authors/Editors are ULSI pioneers with extensive professional and academic experience.

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Chang, C. Y.
Published by McGraw-Hill Higher Education (1996)
ISBN 10: 0071141057 ISBN 13: 9780071141055
New Paperback Quantity Available: 1
Irish Booksellers
(Rumford, ME, U.S.A.)

Book Description McGraw-Hill Higher Education, 1996. Paperback. Book Condition: New. book. Bookseller Inventory # 0071141057

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